Road Lock Hatch ED Series
Road Lock Hatch ED Series
Load lock door used to introduce samples, etc., into a vacuum system 【Features】 ○ Compact and lightweight design allows for flexible installation ○ High vacuum compatibility with fluororubber seals ○ Capable of baking up to 150°C ○ Can be directly attached to CF flanges from φ114 to φ305 ○ Available in various sizes with and without windows; window materials such as quartz glass can be selected as options ○ Custom manufacturing of JIS flanges and special flange shapes is also possible ● For other functions and details, please download the catalog.
- 企業：アリオス
- 価格：Other
